ET4260 Microsystem integration

Topics: Fundamental and practical aspects of integrated microsystems in silicon

Basically, the Microsystem is a complete instrument on a chip (also known as MEMS). The challenges associated with the integration of the transducer and circuits into a single-chip integrated system are more than compensated by the opportunities this concept offers in a wide range of applications.

Firstly, the general issues related to system structure are discussed within the context of a microsystem. Secondly, approaches for multi-domain modeling are discussed in the broad perspective of mechanics, including various transduction mechanisms such as electrostatics and piezoelectrics, wave propagation and electromagnetics. Finally, the transduction concepts are extended to sensors and microsystems. Throughout the course, the software package COMSOL is introduced and used in several tutorials and final project. Only ~12 lecture hours are programmed in this course. The emphasis is on the subsequent project that involves the analysis or design of a microsystem.

By the end of the course, you will be able to:

  • Identify parts of microsystems and their function.
  • Identify equations that govern the behaviour of different microsystem components, from different domains of physics.
  • Use electrical domain models for multidomain microsystems.
  • Use the finite element method (FEM) to model multidomain microsystems, using Comsol.
  • Analyze the dynamic behaviour of linear microsystems.
  • Build models for systems involving new domains of physics, using both electrical domain modelling and FEM.

This year the course is being taught by 3 new tenure trackers (Dr. Tomas Manzaneque, Dr. Karen Dowling, and Dr. Filipe Arroyo Cardoso) with new assignments and re-vamped lecture materials!


dr. Tomás Manzaneque

Microsystems, piezoelectric devices, ultrasound transducers, resonant sensors, acoustic devices.

dr. Filipe Arroyo Cardoso

Sensors & actuators physics, micro- & nano-fabrication, material science, CMOS monolithic integration of different technologies. Main applications: biosensors for Lab-on-a-Chip, implantable, wearable devices.

dr. Karen Dowling

Wide-bandgap Electronics: Sensors, MEMS, and Power Devices

Last modified: 2023-04-13


Credits: 4 EC
Period: 0/0/0/3