ET4260 Microsystem integration

Topics: Fundamental and practical aspects of integrated microsystems in silicon

A microsystem is a complete instrument on a chip that can involve different domains of physics (electrical, mechanical, magnetic, etc.). The challenges associated with the combination of elements of different nature, including transducers and circuits into a single-chip integrated system, are more than compensated by the opportunities this concept offers in a wide range of applications.

In this course, general concepts related to microsystems as sensors are first discussed. Secondly, approaches for multi-domain modeling are introduced and applied to the modelling electro-mechanical systems. Then, different transduction mechanisms, that allow for the conversion of signals between different physical domains, are introduced. Finally, all the modelling concepts are extended to the design of microsystem-based sensors. Throughout the course, the software package Comsol is introduced and used in several tutorials. The course includes theory (~8 lectures), Comsol tutorials, and tutorials for the realization of a final project, in which a microsystem is designed and modelled in groups.


By the end of the course, you will be able to:

- Identify parts of microsystems and their function.

- Identify equations that govern the behaviour of different microsystem components, from different domains of physics.

- Use electrical domain models for multidomain microsystems.

- Use the finite element method (FEM) to model multidomain microsystems, using Comsol.

- Analyze the dynamic behaviour of linear microsystems.

- Design microsystems that meet given specifications, using both electrical domain modelling and FEM.


dr. Tomás Manzaneque

Microsystems, piezoelectric devices, ultrasound transducers, resonant sensors, acoustic devices.

dr. Filipe Arroyo Cardoso

Sensors & actuators physics, micro- & nano-fabrication, material science, CMOS monolithic integration of different technologies. Main applications: biosensors for Lab-on-a-Chip, implantable, wearable devices.

dr. Karen Dowling

Wide-bandgap Electronics: Sensors, MEMS, and Power Devices

Last modified: 2023-07-21


Credits: 4 EC
Period: 0/0/0/3