MSc thesis project proposal

MEMS microfluidic resonator to characterize microplastics in water

Plastic products are a fundamental component of daily life globally. These items gradually produce tiny particles, both micro and nano-sized, during use or when they break down. Particles ranging from 5 mm to 1 micron are termed microplastics, while those smaller than 1 micron are nanoplastics. These particles vary in shape, size, and chemical composition. Microplastics are found everywhere – in the air, water, and even our food – and have the potential to penetrate various human organs, though the full implications of this are not yet clear.

This project focuses on the realization of a suspended microchannel resonator. This is a device featuring a microfluidic channel that can detect particles in the fluid by means of the shift in its mechanical resonance. A novel fabrication technique to implement microchannels buried in silicon will be explored.


[2]  Burg, Thomas P., et al. "Weighing of biomolecules, single cells and single nanoparticles in fluid." nature 446.7139 (2007): 1066.




  • Carry out a literature review on suspended microchannel resonators and the fabrication techniques used to implement them.
  • Test several cleanroom steps to fabricate these devices.
  • Design a cleanroom fabrication process to implement suspended microchannels
  • Perform the fabrication in cleanroom and characterize the results.
  • Test the flow of liquid through the microchannels, to detect problems like clogging or leaking.


You must be motivate to work in cleanroom.


dr. Tomás Manzaneque

Electronic Instrumentation Group

Department of Microelectronics

Last modified: 2024-02-05