Smart Temperature Sensor Survey

This is a survey of the performance of smart temperature sensors published between 1989 and the present. Excel Spreadsheet (Rev 04162022, last updated April 16, 2022)

For use in publications and presentations please cite this survey as follows:
K.A.A. Makinwa, "Smart Temperature Sensor Survey", [Online]. Available: http://ei.ewi.tudelft.nl/docs/TSensor_survey.xls

The following paper motivates the figure of merit used in the survey and gives an overview of the different types of smart temperature sensors:
K.A.A. Makinwa, “Smart Temperature Sensors in Standard CMOS,” (Proc. Eurosensors) Procedia Engineering, pp. 930 – 939, Sept. 2010. pdf

Selected papers on Temperature sensors

S. Pan, J.A. Angevare, K.A.A. Makinwa, “A Self-Calibrated Hybrid Thermal-Diffusivity/Resistor-Based Temperature Sensor,” J. Solid-State Circuits, June 2021. pdf
J.A. Angevare, Y. Chae, K.A.A. Makinwa, “A Highly Digital 2210µm² Resistor-Based Temperature Sensor with a 1-Point Trimmed Inaccuracy of ±1.3°C (3σ) from -55°C to 125°C in 65nm CMOS,” Digest ISSCC, pp. 76 – 78, Feb. 2021.pdf
S. Pan and K.A.A. Makinwa, “A 10fJ∙K2 Wheatstone Bridge Temperature Sensor with a Tail-Resistor-Linearized OTA,” J. Solid-State Circuits, vol. 56, is. 2, 501 – 510, Feb. 2020. pdf
S. Pan, K.A.A Makinwa, "A 6.6-μW Wheatstone-Bridge Temperature Sensor for Biomedical Applications," vol. 3, pp. 334-337, Solid-State Circuits L., Aug. 2020. pdf
B. Yousefzadeh, K. A. A. Makinwa, “A BJT-Based Temperature-to-Digital Converter With a ±0.25 °C 3 σ -Inaccuracy From −40°C to +180°C Using Heater-Assisted Voltage Calibration,” vol. 55, no. 2, pp. 369-377, J. Solid-State Circuits, Feb. 2020. pdf
R. K. Kumar, H. Jiang and K. A. A. Makinwa, "An Energy-Efficient BJT-Based Temperature-to-Digital Converter with ±0.13°C (3σ) Inaccuracy from -40 to 125°C," 2019 IEEE Asian Solid-State Circuits Conference (A-SSCC), 2019, pp. 107-108, doi: 10.1109/A-SSCC47793.2019.9056962. pdf
Y. Lee et al, "A 5800-μm2 Resistor-Based Temperature Sensor With a One-Point Trimmed Inaccuracy of ±1.2°C (3σ) From −50°C to 105°C in 65-nm CMOS", vol. 2, No. 9, pp. 67-70, Solid-State Circuits L., Sept 2019. pdf
J. Angevare and K.A.A. Makinwa, "A 6800-μm² Resistor-Based Temperature Sensor With ±0.35 °C (3σ) Inaccuracy in 180-nm CMOS," J. Solid-State Circuits, 2019. pdf
S. Pan, K.A.A. Makinwa, "A Wheatstone Bridge Temperature Sensor with a Resolution FoM of 20fJ∙K2," Digest ISSCC, pp 186-188, Feb 2019. pdf
S. Pan, Ç. Gürleyük, M.F. Pimenta, K.A.A Makinwa, "A 0.12mm2 Wien-Bridge Temperature Sensor with 0.1°C (3σ) Inaccuracy from -40°C to 180°C," Digest ISSCC, pp 184-186, Feb 2019. pdf
S. Pan and K.A.A. Makinwa, “A 0.25 mm2-Resistor-Based Temperature Sensor With an Inaccuracy of 0.12°C (3σ) From −55°C to 125°C,” vol. 53, is. 12, pp. 3347-3355, J. Solid-State Circuits, Dec 2018. pdf
W. Choi et al., “A Compact Resistor-Based CMOS Temperature Sensor With an Inaccuracy of 0.12°C (3σ) and a Resolution FoM of 0.43 pJ ·K2 in 65-nm CMOS,” vol. 53, is. 12, pp. 3356-3367, J. Solid-State Circuits, Dec 2018. pdf
S. Pan, Y. Luo, S.H. Shalmany and K.A.A. Makinwa, “A Resistor-Based Temperature Sensor with a 0.13pJ·K2 Resolution FOM,” vol. 53, is. 1, pp. 163 – 174, J. Solid-State Circuits, Jan. 2018 pdf
U. Sonmez, F. Sebastiano and K.A.A. Makinwa, “Compact Thermal-Diffusivity-Based Temperature Sensors in 40-nm CMOS for SoC Thermal Monitoring,” vol. 52, is. 3, pp. 834-843, J. Solid-State Circuits, March 2017. pdf
B. Yousefzadeh and K.A.A. Makinwa, "A BJT-Based Temperature Sensor with a Packaging-Robust Inaccuracy of ±0.3°C (3s) from -55°C to +125°C After Heater-Assisted Voltage Calibration," Digest ISSCC, Feb. 2017. pdf
G. Wang, A. Heidari, K.A.A. Makinwa, G.C.M. Meijer, "An accurate BJT-based CMOS temperature sensor with Duty-Cycle-Modulated output," vol. 64, is. 2, pp. 1572-1580, IEEE Trans. on Industrial Electronics, Feb. 2017. pdf
B. Yousefzadeh, S. H. Shalmany and Kofi A. A. Makinwa, “A BJT-based Temperature-to-Digital Converter with ±60mK Inaccuracy from -70°C to +125°C in 160nm CMOS,” vol. 52, is. 4, J. Solid-State Circuits, 2017. pdf
P. Park, D. Ruffieux, K. Makinwa, “A Thermistor-Based Temperature Sensor for a Real-Time Clock With ±2 ppm Frequency Stability,” J. Solid-State Circuits, vol. 50, is. 7, pp. 1571 - 1580, April 2015. pdf
K. Souri, Y. Chae, F. Thus, K. Makinwa, “A 0.85V 600nW all-CMOS temperature sensor with an inaccuracy of ±0.4°C (3σ) from -40 to 125°C ,” Digest ISSCC, pp. 222-223, Feb. 2014. pdf
M. Shahmohammadi, K. Souri and K.A.A. Makinwa, “A Resistor-Based Temperature Sensor for MEMS Frequency References,” Proc. ESSCIRC, pp. 225 – 228, Sept. 2013. pdf
K. Souri, K. Souri and K.A.A. Makinwa, “A 40µW CMOS temperature sensor with an inaccuracy of ±0.4°C (3σ) from −55°C to 200°C,” Proc. ESSCIRC, pp. 221 – 224, Sept. 2013. pdf
A.L. Aita, M.A.P. Pertijs, K.A.A. Makinwa, J.H. Huijsing and G.C.M. Meijer, “A Low-Power CMOS Smart Temperature Sensor with a Batch-Calibrated Inaccuracy of ±0.25°C (±3σ) from –70° to 130°C,” vol. 13, is. 5, IEEE Sensors J., pp. 1840 – 1848, May 2013. pdf
K. Souri, Y. Chae and K.A.A. Makinwa, “A CMOS Temperature Sensor With a Voltage-Calibrated Inaccuracy of ±0.15°C (3s) From -55 to 125°C,” J. Solid-State Circuits, vol. 47, is. 12, Jan. 2013. pdf
C.P.L. van Vroonhoven and K.A.A. Makinwa “An SOI Thermal-Diffusivity-Based Temperature Sensor with ±0.6°C (3σ) Untrimmed Inaccuracy from -70°C to 225°C,” Sensors and Actuators A, vol. 188, pp. 66–74, Dec. 2012. pdf
C.P.L. van Vroonhoven and K.A.A. Makinwa, “Thermal Diffusivity Sensing: A New Temperature Sensing Paradigm”, Proc. CICC, Sept. 2011. pdf
K. Souri and K.A.A. Makinwa, “A 0.12mm2 7.4μW Micropower Temperature Sensor with an Inaccuracy of 0.2°C (3-Sigma) from -30°C to 125°C,” J. Solid-State Circuits, vol. 46, is. 7, pp. 1693 - 1700, July 2011. pdf
F. Sebastiano, L.J. Breems, K.A.A. Makinwa, S. Drago, D. Leenaerts, B. Nauta, “A 1.2V 10mW NPN-Based Temperature Sensor in 65nm CMOS with an inaccuracy of ±0.2°C from –70°C to 125°C,” J. Solid-State Circuits, vol. 45, is. 12, pp. 2591 – 2601, Dec. 2010. pdf
K.A.A. Makinwa, “Smart Temperature Sensors in Standard CMOS,” (Proc. Eurosensors) Procedia Engineering, pp. 930 – 939, Sept. 2010. pdf
M.A.P. Pertijs, A.L. Aita, K.A.A. Makinwa and J.H. Huijsing, “Low-Cost Calibration Techniques for Smart Temperature Sensors,” IEEE Sensors Journal, vol. 10, is. 6, pp. 1098 – 1105, June 2010. pdf
C.P.L. van Vroonhoven and K.A.A. Makinwa, “A Thermal-Diffusivity-Based Temperature Sensor with an Untrimmed Inaccuracy of ±0.2°C (3σ) from –55 to 125°C,” Digest ISSCC, pp. 314 – 315, Feb. 2010. pdf
M. Kashmiri, S. Xia and K.A.A. Makinwa, “A Temperature-to-Digital Converter Based on an Optimized Electrothermal Filter,” J. Solid-State Circuits, vol. 44, is. 7, pp. 2026 – 2035, July 2009. pdf
C.P.L. van Vroonhoven and K.A.A. Makinwa, “A CMOS Temperature-to-Digital Converter with an Inaccuracy of ±0.5°C (3σ) from –55 to 125°C,” Digest ISSCC, pp. 576 - 577, Feb. 2008. pdf
K.A.A. Makinwa and M.F. Snoeij, “A CMOS temperature-to-frequency converter with an inaccuracy of ±0.5°C (3s) from –40 to 105°C,” J. Solid-State Circuits, vol. 41, is. 12, pp. 2992 – 2997, Dec. 2006. pdf
M.A.P. Pertijs, K.A.A. Makinwa and J.H. Huijsing, “A CMOS temperature sensor with a 3s inaccuracy of ±0.1°C from -55°C to 125°C,” J. Solid-State Circuits, vol. 40, is. 12, pp. 2805 – 2815, Dec. 2005. pdf
M.A.P. Pertijs, A. Niederkorn, X. Ma, B. McKillop, A. Bakker, J.H. Huijsing, “A CMOS smart temperature sensor with a 3σ inaccuracy of ±0.5°C from -50°C to 120°C,” J. Solid-State Circuits, vol. 40, is. 2, pp. 454-461, Feb. 2005. pdf